Citation: |
Zhang Qunshe, Chen Zhiming. Effects of Different Heights and Spaces of a Multi-Turn Inductive Coil on Temperature Distribution in the Large-Size 6H-SiC Growth System[J]. Journal of Semiconductors, 2007, 28(S1): 225-229.
****
Zhang Q S, Chen Z M. Effects of Different Heights and Spaces of a Multi-Turn Inductive Coil on Temperature Distribution in the Large-Size 6H-SiC Growth System[J]. Chin. J. Semicond., 2007, 28(S1): 225.
|
Effects of Different Heights and Spaces of a Multi-Turn Inductive Coil on Temperature Distribution in the Large-Size 6H-SiC Growth System
-
Abstract
The influences of different spaces between turns of the induction coil and different relative positions between the coil and the crucible on the temperature distribution of the growth chamber,SiC powder,growing crystal and the radial tern- perature gradients of crystal growth surfaces are investigated systematically for the large size 6H-SiC growth. All simulations results indicate that the temperature field in the growth system can be optimized by adjusting the height and spaces between turns of inductive coil,assuming that the output power and frequency,as well as inner radius of blind hole are constant. -
References
-
Proportional views