Chin. J. Semicond. > 2004, Volume 25 > Issue 1 > 56-59
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ZnO-SnO_2透明导电膜的低温制备及性质

黄树来 , 马瑾 , 刘晓梅 , 马洪磊 , 孙征 and 张德恒

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Key words: 透明导电膜, ZnO-SnO2, 射频磁控溅射

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    Received: 19 August 2015 Revised: Online: Published: 01 January 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(1): 56-59
      黄树来, 马瑾, 刘晓梅, 马洪磊, 孙征, 张德恒. ZnO-SnO_2透明导电膜的低温制备及性质[J]. 半导体学报(英文版), 2004, 25(1): 56-59.
      Citation:
      黄树来, 马瑾, 刘晓梅, 马洪磊, 孙征, 张德恒. ZnO-SnO_2透明导电膜的低温制备及性质[J]. 半导体学报(英文版), 2004, 25(1): 56-59.
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      • Received Date: 2015-08-19

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