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高文钰, 刘忠立, 和致经, 于芳, 梁桂荣, 李国花. 硅表面清洗对热氧化13nm SiO_2可靠性的影响[J]. 半导体学报(英文版), 1999, 20(5): 383-388.
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Received: 20 August 2015 Revised: Online: Published: 01 May 1999
Citation: |
高文钰, 刘忠立, 和致经, 于芳, 梁桂荣, 李国花. 硅表面清洗对热氧化13nm SiO_2可靠性的影响[J]. 半导体学报(英文版), 1999, 20(5): 383-388.
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