Abstract: Anatase TiO2 thin films on glass substrates are obtained in an aqueous solution of ( N~4 ) 2TiF6 and ~3BO3 supersaturated With nano-crystalline TiO2 . Transparent anatase TiO2 thin films is obtained at 35 When the concentration of TiF2-6 in the aqueous solution is 0. 1mol /L , and the TiF2-6 /~3BO3 molar ratio is 1= 2~ 4. The film thickness increases with deposition time. The film thickness is 260nm at a deposition time of 9h. AFM micrographs of films calcined at various temperatures are all smooth and uniform. The FTIR spectra of the as-deposited film shows that the TiO2 film has formed the Ti-O-Si bond With the glass. Photocatalytic actiVity of the TiO2 thin films is eValuated by methylene blue degradation. The TiO2 thin films prepared by calcination at 300 show the highest photocatalytic actiVity, Which is 5 times of the actiVity of the films prepared by deposition at 35 .

Key words: deposition from aqueous solutions