Chin. J. Semicond. > 2000, Volume 21 > Issue 2 > 146-150

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薄栅氧化层击穿特性的实验研究

刘红侠 and 郝跃

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Key words: 击穿, 栅氧化层, 实验, 与时间有关的介质击穿(TDDB)

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    Received: 20 August 2015 Revised: Online: Published: 01 February 2000

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      刘红侠, 郝跃. 薄栅氧化层击穿特性的实验研究[J]. 半导体学报(英文版), 2000, 21(2): 146-150.
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      刘红侠, 郝跃. 薄栅氧化层击穿特性的实验研究[J]. 半导体学报(英文版), 2000, 21(2): 146-150.

      • Received Date: 2015-08-20

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