Chin. J. Semicond. > 1997, Volume 18 > Issue 3 > 212-217
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采用混合结构定子的压电超声微电机的固有频率特性分析

张健 , 沈德新 and 王渭源

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    Received: 19 August 2015 Revised: Online: Published: 01 March 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(3): 212-217
      张健, 沈德新, 王渭源. 采用混合结构定子的压电超声微电机的固有频率特性分析[J]. 半导体学报(英文版), 1997, 18(3): 212-217.
      Citation:
      张健, 沈德新, 王渭源. 采用混合结构定子的压电超声微电机的固有频率特性分析[J]. 半导体学报(英文版), 1997, 18(3): 212-217.
      shu

      • Received Date: 2015-08-19

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