| Citation: |
Wang Liang, Zhao Yongmei, Ning Jin, Sun Guosheng, Wang Lei, Liu Xingfang, Zhao Wanshun, Zeng Yiping, Li Jinmin. Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures[J]. Journal of Semiconductors, 2008, 29(8): 1453-1456.
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Wang L, Zhao Y M, Ning J, Sun G S, Wang L, Liu X F, Zhao W S, Zeng Y P, Li J M. Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures[J]. J. Semicond., 2008, 29(8): 1453.
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Laterally Electrostatically Driven Poly 3C-SiC Folded-Beam Resonant Microstructures
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Abstract
Micromachined comb-drive electrostatic resonators with folded-cantilever beams were designed and fabricated.A combination of Rayleigh’s method and finite-element analysis was used to calculate the resonant frequency drift as we adjusted the device geometry and material parameters.Three micromachined lateral resonant resonators with different beam widths were fabricated.Their resonant frequencies were experimentally measured to be 64.5,147.2,and 2555kHz,respectively,which are in good agreement with the simulated resonant frequency.It is shown that an improved frequency performance could be obtained on the poly 3C-SiC based device structural material systems with high Young’s modulus.-
Keywords:
- lateral resonant device,
- folded-beam,
- comb structure,
- MEMS,
- resonator,
- silicon carbide
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References
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Proportional views
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