Chin. J. Semicond. > 1987, Volume 8 > Issue 6 > 625-630
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Al-Mo-Ti-PtSi-Si金属化系统特性研究

陈正明 , 徐建良 , 罗晋生 and 沈文正

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    Received: 19 August 2015 Revised: Online: Published: 01 June 1987

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      Article Navigation >  Journal of Semiconductors  > 1987  >  8(6): 625-630
      陈正明, 徐建良, 罗晋生, 沈文正. Al-Mo-Ti-PtSi-Si金属化系统特性研究[J]. 半导体学报(英文版), 1987, 8(6): 625-630.
      Citation:
      陈正明, 徐建良, 罗晋生, 沈文正. Al-Mo-Ti-PtSi-Si金属化系统特性研究[J]. 半导体学报(英文版), 1987, 8(6): 625-630.
      shu

      • Received Date: 2015-08-19

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