Chin. J. Semicond. > 1987, Volume 8 > Issue 6 > 631-636
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As~+注入SOI的快速热退火研究

林成鲁 and 邹世昌

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    Received: 19 August 2015 Revised: Online: Published: 01 June 1987

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      Article Navigation >  Journal of Semiconductors  > 1987  >  8(6): 631-636
      林成鲁, 邹世昌. As~+注入SOI的快速热退火研究[J]. 半导体学报(英文版), 1987, 8(6): 631-636.
      Citation:
      林成鲁, 邹世昌. As~+注入SOI的快速热退火研究[J]. 半导体学报(英文版), 1987, 8(6): 631-636.
      shu

      • Received Date: 2015-08-19

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