Chin. J. Semicond. > 2003, Volume 24 > Issue 12 > 1289-1292
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双异质外延SOI材料Si/γ-Al_2O_3/Si的外延生长

谭利文 , 王俊 , 王启元 , 郁元桓 , 邓惠芳 , 王建华 and 林兰英

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Key words: SOI, MOCVD, 双异质外延, Si/γ-Al2O3/Si

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(12): 1289-1292
      谭利文, 王俊, 王启元, 郁元桓, 邓惠芳, 王建华, 林兰英. 双异质外延SOI材料Si/γ-Al_2O_3/Si的外延生长[J]. 半导体学报(英文版), 2003, 24(12): 1289-1292.
      Citation:
      谭利文, 王俊, 王启元, 郁元桓, 邓惠芳, 王建华, 林兰英. 双异质外延SOI材料Si/γ-Al_2O_3/Si的外延生长[J]. 半导体学报(英文版), 2003, 24(12): 1289-1292.
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      • Received Date: 2015-08-20

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