Chin. J. Semicond. > 2003, Volume 24 > Issue 12 > 1285-1288
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面向对注氢硅片中微结构的影响

肖清华 , 屠海令 , 王敬 , 周旗钢 and 张果虎

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Key words: 硅, 面向, 氢, 离子注入, 氢致缺陷

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(12): 1285-1288
      肖清华, 屠海令, 王敬, 周旗钢, 张果虎. 面向对注氢硅片中微结构的影响[J]. 半导体学报(英文版), 2003, 24(12): 1285-1288.
      Citation:
      肖清华, 屠海令, 王敬, 周旗钢, 张果虎. 面向对注氢硅片中微结构的影响[J]. 半导体学报(英文版), 2003, 24(12): 1285-1288.
      shu

      • Received Date: 2015-08-20

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