Chin. J. Semicond. > 1983, Volume 4 > Issue 3 > 287-290
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绝缘衬底上硅膜的激光侧向外延

林惠旺 , 钱佩信 , 马腾阁 and 李志坚

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    Received: 20 August 2015 Revised: Online: Published: 01 March 1983

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      Article Navigation >  Journal of Semiconductors  > 1983  >  4(3): 287-290
      林惠旺, 钱佩信, 马腾阁, 李志坚. 绝缘衬底上硅膜的激光侧向外延[J]. 半导体学报(英文版), 1983, 4(3): 287-290.
      Citation:
      林惠旺, 钱佩信, 马腾阁, 李志坚. 绝缘衬底上硅膜的激光侧向外延[J]. 半导体学报(英文版), 1983, 4(3): 287-290.
      shu

      • Received Date: 2015-08-20

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