Citation: |
Lin Hongyi. Later Silicon Ages[J]. Journal of Semiconductors, 2003, 24(S1): 11-16.
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Lin H Y. Later Silicon Ages[J]. Chin. J. Semicond., 2003, 24(S1): 11.
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Later Silicon Ages
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Abstract
In the last decade of the 20th century, a brand-new field of nano scale science and technology has emerged in the World. The fundamental and applications of nano scale science and technolgy are intrOduced. The applications of nanotechnology Which include uantum function devices, film sensors, nanodisplay, nanometer scale materials, micrOelectrOmechanical systems ( MEMS , nanobiological technology and atomic engineering, etc. are prospected. Some e perimental results are given. -
References
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Proportional views