Chin. J. Semicond. > 1997, Volume 18 > Issue 2 > 156-160

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多元素测试仪测定二氯硅烷中的痕量磷

闻瑞梅 , 周淑君 , 袁越 and 赵振环

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    Received: 19 August 2015 Revised: Online: Published: 01 February 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(2): 156-160
      闻瑞梅, 周淑君, 袁越, 赵振环. 多元素测试仪测定二氯硅烷中的痕量磷[J]. 半导体学报(英文版), 1997, 18(2): 156-160.
      Citation:
      闻瑞梅, 周淑君, 袁越, 赵振环. 多元素测试仪测定二氯硅烷中的痕量磷[J]. 半导体学报(英文版), 1997, 18(2): 156-160.
      shu

      • Received Date: 2015-08-19

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