Chin. J. Semicond. > 1990, Volume 11 > Issue 9 > 698-705
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N~+型重掺杂硅快速氧化新方法──氟化氢增强氧化之二

徐强 , 徐元森 and 龙伟

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(9): 698-705
      徐强, 徐元森, 龙伟. N~+型重掺杂硅快速氧化新方法──氟化氢增强氧化之二[J]. 半导体学报(英文版), 1990, 11(9): 698-705.
      Citation:
      徐强, 徐元森, 龙伟. N~+型重掺杂硅快速氧化新方法──氟化氢增强氧化之二[J]. 半导体学报(英文版), 1990, 11(9): 698-705.
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      • Received Date: 2015-08-19

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