Chin. J. Semicond. > 1990, Volume 11 > Issue 9 > 694-697
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多晶硅应变膜压力传感器

王跃林 , 刘理天 , 郑心畲 and 李志坚

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(9): 694-697
      王跃林, 刘理天, 郑心畲, 李志坚. 多晶硅应变膜压力传感器[J]. 半导体学报(英文版), 1990, 11(9): 694-697.
      Citation:
      王跃林, 刘理天, 郑心畲, 李志坚. 多晶硅应变膜压力传感器[J]. 半导体学报(英文版), 1990, 11(9): 694-697.
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      • Received Date: 2015-08-19

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