Chin. J. Semicond. > 1990, Volume 11 > Issue 9 > 688-693
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利用能量过滤成像技术对注氮SOI的研究

段晓峰 , 都安彦 and 褚一鸣

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    Received: 19 August 2015 Revised: Online: Published: 01 September 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(9): 688-693
      段晓峰, 都安彦, 褚一鸣. 利用能量过滤成像技术对注氮SOI的研究[J]. 半导体学报(英文版), 1990, 11(9): 688-693.
      Citation:
      段晓峰, 都安彦, 褚一鸣. 利用能量过滤成像技术对注氮SOI的研究[J]. 半导体学报(英文版), 1990, 11(9): 688-693.
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      • Received Date: 2015-08-19

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