Chin. J. Semicond. > 1994, Volume 15 > Issue 11 > 737-740
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红外区熔再结晶SOI中形貌缺陷的产生与抑制

张鹏飞，侯东彦，杨景铭，钱佩信，罗台秦

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(11): 737-740
      张鹏飞，侯东彦，杨景铭，钱佩信，罗台秦. 红外区熔再结晶SOI中形貌缺陷的产生与抑制[J]. 半导体学报(英文版), 1994, 15(11): 737-740.
      Citation:
      张鹏飞，侯东彦，杨景铭，钱佩信，罗台秦. 红外区熔再结晶SOI中形貌缺陷的产生与抑制[J]. 半导体学报(英文版), 1994, 15(11): 737-740.
      shu

      • Received Date: 2015-08-19

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