Chin. J. Semicond. > 2001, Volume 22 > Issue 4 > 486-490
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SOINMOSFET沟道热载流子的应力损伤

郝跃 , 朱建纲 , 郭林 and 张正幡

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Key words: SIMOX, SOI, PBT, 热载流子, 阈值电压

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    Received: 20 August 2015 Revised: Online: Published: 01 April 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(4): 486-490
      郝跃, 朱建纲, 郭林, 张正幡. SOINMOSFET沟道热载流子的应力损伤[J]. 半导体学报(英文版), 2001, 22(4): 486-490.
      Citation:
      郝跃, 朱建纲, 郭林, 张正幡. SOINMOSFET沟道热载流子的应力损伤[J]. 半导体学报(英文版), 2001, 22(4): 486-490.
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      • Received Date: 2015-08-20

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