Chin. J. Semicond. > 2004, Volume 25 > Issue 7 > 798-803
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杂质对单晶硅材料硬度的作用

李东升 , 杨德仁 and 阙端麟

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Key words: 硬度, 杂质, 硅单晶, 晶向

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    Received: 19 August 2015 Revised: Online: Published: 01 July 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(7): 798-803
      李东升, 杨德仁, 阙端麟. 杂质对单晶硅材料硬度的作用[J]. 半导体学报(英文版), 2004, 25(7): 798-803.
      Citation:
      李东升, 杨德仁, 阙端麟. 杂质对单晶硅材料硬度的作用[J]. 半导体学报(英文版), 2004, 25(7): 798-803.
      shu

      • Received Date: 2015-08-19

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