Chin. J. Semicond. > 1996, Volume 17 > Issue 7 > 513-517
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扫描隧道显微镜重掺硅（111）表面微缺陷研究

刘鸿飞，秦福，朱悟新，尤重远，陈开茅

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    Received: 18 August 2015 Revised: Online: Published: 01 July 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(7): 513-517
      刘鸿飞，秦福，朱悟新，尤重远，陈开茅. 扫描隧道显微镜重掺硅（111）表面微缺陷研究[J]. 半导体学报(英文版), 1996, 17(7): 513-517.
      Citation:
      刘鸿飞，秦福，朱悟新，尤重远，陈开茅. 扫描隧道显微镜重掺硅（111）表面微缺陷研究[J]. 半导体学报(英文版), 1996, 17(7): 513-517.
      shu

      • Received Date: 2015-08-18

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