Chin. J. Semicond. > 1993, Volume 14 > Issue 12 > 734-737
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锗离子注入硅单晶的非晶化及二次缺陷的研究

范缇文 , 张敬平 and P.L.F.Hemment

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    Received: 20 August 2015 Revised: Online: Published: 01 December 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(12): 734-737
      范缇文, 张敬平, P.L.F.Hemment. 锗离子注入硅单晶的非晶化及二次缺陷的研究[J]. 半导体学报(英文版), 1993, 14(12): 734-737.
      Citation:
      范缇文, 张敬平, P.L.F.Hemment. 锗离子注入硅单晶的非晶化及二次缺陷的研究[J]. 半导体学报(英文版), 1993, 14(12): 734-737.
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      • Received Date: 2015-08-20

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