Chin. J. Semicond. > 2004, Volume 25 > Issue 2 > 174-178
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一种新型CMOS兼容湿度传感器

顾磊 , 黄庆安 , 秦明 , 张中平 and 严先蔚

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Key words: 湿度传感器, 微电子机械系统, CMOS, MEMS

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    Received: 19 August 2015 Revised: Online: Published: 01 February 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(2): 174-178
      顾磊, 黄庆安, 秦明, 张中平, 严先蔚. 一种新型CMOS兼容湿度传感器[J]. 半导体学报(英文版), 2004, 25(2): 174-178.
      Citation:
      顾磊, 黄庆安, 秦明, 张中平, 严先蔚. 一种新型CMOS兼容湿度传感器[J]. 半导体学报(英文版), 2004, 25(2): 174-178.
      shu

      • Received Date: 2015-08-19

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