| Citation: |
Zhang Xuena, Xu Xueging, Shen Hui, Zheng Yuehua. Preparation and Performances of antireflective Coating[J]. Journal of Semiconductors, 2003, 24(S1): 85-90.
****
Zhang X N, X X, Shen H, Zheng Y H. Preparation and Performances ofantireflective Coating[J]. Chin. J. Semicond., 2003, 24(S1): 85.
|
Preparation and Performances of antireflective Coating
-
Abstract
The preparations of silica antireflective coating on glass by sol-gel process and RF sputtering process are discussed and compared. The effects of sol concentration, aging and annealing on antireflectivity are investigated. While the sol concentration is 0.4M, aging time is 6 days and annealing temperature is 450℃, the transmittance of the coated glass can reach up to 99.3%. The structure of sol and gel is studied Using IR spectroscopy, and it is found that the Si-O-Si bonds were strengthened after aging and annealing.
-
Keywords:
- silica coating,
- antireflectivity,
- Sol-Gel process,
- IR spectroscopy
-
References
-
Proportional views
DownLoad: