Chin. J. Semicond. > 1992, Volume 13 > Issue 11 > 698-703
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硅中的氮氧复合物和碳氧复合物

刘培东 , 余思明 , 李立本 , 张锦心 and 阙端麟

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1992

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      Article Navigation >  Journal of Semiconductors  > 1992  >  13(11): 698-703
      刘培东, 余思明, 李立本, 张锦心, 阙端麟. 硅中的氮氧复合物和碳氧复合物[J]. 半导体学报(英文版), 1992, 13(11): 698-703.
      Citation:
      刘培东, 余思明, 李立本, 张锦心, 阙端麟. 硅中的氮氧复合物和碳氧复合物[J]. 半导体学报(英文版), 1992, 13(11): 698-703.
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      • Received Date: 2015-08-19

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