Chin. J. Semicond. > 2004, Volume 25 > Issue 2 > 221-226
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无测试图形薄层电阻测试仪及探针定位

刘新福 , 孙以材 , 刘东升 , 陈志永 , 张艳辉 and 王静

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Key words: 四探针技术, 薄层电阻, 探针游移, 等值线图

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    Received: 19 August 2015 Revised: Online: Published: 01 February 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(2): 221-226
      刘新福, 孙以材, 刘东升, 陈志永, 张艳辉, 王静. 无测试图形薄层电阻测试仪及探针定位[J]. 半导体学报(英文版), 2004, 25(2): 221-226.
      Citation:
      刘新福, 孙以材, 刘东升, 陈志永, 张艳辉, 王静. 无测试图形薄层电阻测试仪及探针定位[J]. 半导体学报(英文版), 2004, 25(2): 221-226.
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      • Received Date: 2015-08-19

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