Chin. J. Semicond. > 1986, Volume 7 > Issue 5 > 531-538
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硅粗糙表面的椭偏法研究和改进的OL模型

刘安胜 and 莫党

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    Received: 20 August 2015 Revised: Online: Published: 01 May 1986

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      Article Navigation >  Journal of Semiconductors  > 1986  >  7(5): 531-538
      刘安胜, 莫党. 硅粗糙表面的椭偏法研究和改进的OL模型[J]. 半导体学报(英文版), 1986, 7(5): 531-538.
      Citation:
      刘安胜, 莫党. 硅粗糙表面的椭偏法研究和改进的OL模型[J]. 半导体学报(英文版), 1986, 7(5): 531-538.
      shu

      • Received Date: 2015-08-20

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