Chin. J. Semicond. > 2003, Volume 24 > Issue 11 > 1176-1179
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晶片键合界面应力分布的理论分析

周震 , 孔熹峻 , 黄永清 and 任晓敏

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Key words: 键合, 剪应力, 正应力, 剥离应力

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    Received: 20 August 2015 Revised: Online: Published: 01 November 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(11): 1176-1179
      周震, 孔熹峻, 黄永清, 任晓敏. 晶片键合界面应力分布的理论分析[J]. 半导体学报(英文版), 2003, 24(11): 1176-1179.
      Citation:
      周震, 孔熹峻, 黄永清, 任晓敏. 晶片键合界面应力分布的理论分析[J]. 半导体学报(英文版), 2003, 24(11): 1176-1179.
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      • Received Date: 2015-08-20

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