Chin. J. Semicond. > 2003, Volume 24 > Issue 12 > 1340-1344

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一个集成电路工艺诊断实例

严利人 , 李瑞伟 and 徐春林

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Key words: PCM(processcontrolmodule), 工艺诊断, 主成分分析

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(12): 1340-1344
      严利人, 李瑞伟, 徐春林. 一个集成电路工艺诊断实例[J]. 半导体学报(英文版), 2003, 24(12): 1340-1344.
      Citation:
      严利人, 李瑞伟, 徐春林. 一个集成电路工艺诊断实例[J]. 半导体学报(英文版), 2003, 24(12): 1340-1344.
      shu

      • Received Date: 2015-08-20

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