Chin. J. Semicond. > 2003, Volume 24 > Issue 12 > 1335-1339
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影响全息光刻图形质量的因素

陈芬 , 周亚训 , 冯伯儒 and 张锦

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Key words: 全息光刻, 衍射效率

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(12): 1335-1339
      陈芬, 周亚训, 冯伯儒, 张锦. 影响全息光刻图形质量的因素[J]. 半导体学报(英文版), 2003, 24(12): 1335-1339.
      Citation:
      陈芬, 周亚训, 冯伯儒, 张锦. 影响全息光刻图形质量的因素[J]. 半导体学报(英文版), 2003, 24(12): 1335-1339.
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      • Received Date: 2015-08-20

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