Fabrication of 8×8 MEMS Optical Switch Array

Jia Cuiping; Dong Wei; Zhou Jingran; Liu Caixia; Zang Huidong; Xuan Wei; Xu Baokun; Chen Weiyou

State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sc
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

Article Navigation > Journal of Semiconductors > 2006 > 27(S1): 343-346

Jia Cuiping, Dong Wei, Zhou Jingran, Liu Caixia, Zang Huidong, Xuan Wei, Xu Baokun, Chen Weiyou. Fabrication of 8×8 MEMS Optical Switch Array[J]. Journal of Semiconductors, 2006, 27(S1): 343-346. ****Jia C P, Dong W, Zhou J R, Liu C X, Zang H D, Xuan W, Xu B K, Chen W Y. Fabrication of 8×8 MEMS Optical Switch Array[J]. Chin. J. Semicond., 2006, 27(13): 343.

Citation:

Jia Cuiping, Dong Wei, Zhou Jingran, Liu Caixia, Zang Huidong, Xuan Wei, Xu Baokun, Chen Weiyou. Fabrication of 8×8 MEMS Optical Switch Array[J]. Journal of Semiconductors, 2006, 27(S1): 343-346. ****

Jia C P, Dong W, Zhou J R, Liu C X, Zang H D, Xuan W, Xu B K, Chen W Y. Fabrication of 8×8 MEMS Optical Switch Array[J]. Chin. J. Semicond., 2006, 27(13): 343.

Citation:

Jia C P, Dong W, Zhou J R, Liu C X, Zang H D, Xuan W, Xu B K, Chen W Y. Fabrication of 8×8 MEMS Optical Switch Array[J]. Chin. J. Semicond., 2006, 27(13): 343.

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Fabrication of 8×8 MEMS Optical Switch Array

State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
Key Laboratory of Excited State Processes,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sc
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China
State Key Laboratory of Integrate Optoelectronics,College of Electronic Sciences & Engineering,Jilin University,Changchun 130012,China

Received Date: 2015-08-20

Abstract

Abstract

Torsion beam 8×8 optical switch array driven by electrostatic,including upper and under electrodes,was fabricated by MEMES technique.According to crystal characteristics of (110) silicon and anisotropic etching in KOH solution,8×8 micro-mirror array was fabricated.Moreover,the structure of optical switches is rectified by a consideration of undercut when micro-mirrors are etched.The Slant electrode was fabricated in tilting (111) silicon.The whole fabrication technology is characterized by simple technique and low cost.Life time is about 1E7 cycles and tested switch time is less than 10ms.
- optical switches,
- (110) silicon,
- micro-mirror,
- switch time

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