Chin. J. Semicond. > 1992, Volume 13 > Issue 10 > 642-645
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分子束外延中的掺硼工艺

杨小平 , 蒋维栋 , 樊永良 , 盛篪 , 俞鸣人 and 李炳宗

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    Received: 19 August 2015 Revised: Online: Published: 01 October 1992

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      Article Navigation >  Journal of Semiconductors  > 1992  >  13(10): 642-645
      杨小平, 蒋维栋, 樊永良, 盛篪, 俞鸣人, 李炳宗. 分子束外延中的掺硼工艺[J]. 半导体学报(英文版), 1992, 13(10): 642-645.
      Citation:
      杨小平, 蒋维栋, 樊永良, 盛篪, 俞鸣人, 李炳宗. 分子束外延中的掺硼工艺[J]. 半导体学报(英文版), 1992, 13(10): 642-645.
      shu

      • Received Date: 2015-08-19

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