Chin. J. Semicond. > 2004, Volume 25 > Issue 4 > 477-480

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基于MEMS技术的全光热成像芯片与系统的研制

冯飞 , 焦继伟 , 熊斌 and 王跃林

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Key words: 微机电系统(MEMS), 光读出热成像, 可动微镜阵列, 法布里-泊罗干涉仪

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(4): 477-480
      冯飞, 焦继伟, 熊斌, 王跃林. 基于MEMS技术的全光热成像芯片与系统的研制[J]. 半导体学报(英文版), 2004, 25(4): 477-480.
      Citation:
      冯飞, 焦继伟, 熊斌, 王跃林. 基于MEMS技术的全光热成像芯片与系统的研制[J]. 半导体学报(英文版), 2004, 25(4): 477-480.
      shu

      • Received Date: 2015-08-19

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