Chin. J. Semicond. > 1999, Volume 20 > Issue 7 > 559-561
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低温Si-GSMBE中Si_2H_6的热裂解及对Si生长的影响

李建平 , 黄大定 , 刘金平 , 刘学锋 , 李灵宵 , 朱世荣 , 孙殿照 and 孔梅影

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    Received: 20 August 2015 Revised: Online: Published: 01 July 1999

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      Article Navigation >  Journal of Semiconductors  > 1999  >  20(7): 559-561
      李建平, 黄大定, 刘金平, 刘学锋, 李灵宵, 朱世荣, 孙殿照, 孔梅影. 低温Si-GSMBE中Si_2H_6的热裂解及对Si生长的影响[J]. 半导体学报(英文版), 1999, 20(7): 559-561.
      Citation:
      李建平, 黄大定, 刘金平, 刘学锋, 李灵宵, 朱世荣, 孙殿照, 孔梅影. 低温Si-GSMBE中Si_2H_6的热裂解及对Si生长的影响[J]. 半导体学报(英文版), 1999, 20(7): 559-561.
      shu

      • Received Date: 2015-08-20

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