Chin. J. Semicond. > 2000, Volume 21 > Issue 9 > 862-866
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用固相外延方法制备Si_(1-x-y)Ge_xC_y三元材料

于卓 , 李代宗 , 成步文 , 黄昌俊 , 雷震霖 , 余金中 , 王启明 and 梁骏吾

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Key words: Si_(1-x-y)Ge_xC_y材料, 固相外延

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    Received: 20 August 2015 Revised: Online: Published: 01 September 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(9): 862-866
      于卓, 李代宗, 成步文, 黄昌俊, 雷震霖, 余金中, 王启明, 梁骏吾. 用固相外延方法制备Si_(1-x-y)Ge_xC_y三元材料[J]. 半导体学报(英文版), 2000, 21(9): 862-866.
      Citation:
      于卓, 李代宗, 成步文, 黄昌俊, 雷震霖, 余金中, 王启明, 梁骏吾. 用固相外延方法制备Si_(1-x-y)Ge_xC_y三元材料[J]. 半导体学报(英文版), 2000, 21(9): 862-866.
      shu

      • Received Date: 2015-08-20

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