Chin. J. Semicond. > 1988, Volume 9 > Issue 3 > 305-307
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InP和InGaAsP晶体上衍射光栅的刻制技术

郑育红 , 缪育博 , 田慧良 , 姒元宬 and 张静媛

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    Received: 19 August 2015 Revised: Online: Published: 01 March 1988

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      Article Navigation >  Journal of Semiconductors  > 1988  >  9(3): 305-307
      郑育红, 缪育博, 田慧良, 姒元宬, 张静媛. InP和InGaAsP晶体上衍射光栅的刻制技术[J]. 半导体学报(英文版), 1988, 9(3): 305-307.
      Citation:
      郑育红, 缪育博, 田慧良, 姒元宬, 张静媛. InP和InGaAsP晶体上衍射光栅的刻制技术[J]. 半导体学报(英文版), 1988, 9(3): 305-307.
      shu

      • Received Date: 2015-08-19

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