Chin. J. Semicond. > 1989, Volume 10 > Issue 7 > 514-518
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注入氧形成的SOI结构中氧分布的模拟

阮刚 , 徐晨曦 and 俞强

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    Received: 19 August 2015 Revised: Online: Published: 01 July 1989

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      Article Navigation >  Journal of Semiconductors  > 1989  >  10(7): 514-518
      阮刚, 徐晨曦, 俞强. 注入氧形成的SOI结构中氧分布的模拟[J]. 半导体学报(英文版), 1989, 10(7): 514-518.
      Citation:
      阮刚, 徐晨曦, 俞强. 注入氧形成的SOI结构中氧分布的模拟[J]. 半导体学报(英文版), 1989, 10(7): 514-518.
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      • Received Date: 2015-08-19

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