Chin. J. Semicond. > 1991, Volume 12 > Issue 8 > 482-487
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RRH/VLP-CVD低温外延硅薄膜的电学性质

江若琏 , 郑有炓 , 马金中 , 冯德伸 , 江宁 , 张荣 , 胡立群 and 李学宁

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    Received: 19 August 2015 Revised: Online: Published: 01 August 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(8): 482-487
      江若琏, 郑有炓, 马金中, 冯德伸, 江宁, 张荣, 胡立群, 李学宁. RRH/VLP-CVD低温外延硅薄膜的电学性质[J]. 半导体学报(英文版), 1991, 12(8): 482-487.
      Citation:
      江若琏, 郑有炓, 马金中, 冯德伸, 江宁, 张荣, 胡立群, 李学宁. RRH/VLP-CVD低温外延硅薄膜的电学性质[J]. 半导体学报(英文版), 1991, 12(8): 482-487.
      shu

      • Received Date: 2015-08-19

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