Chin. J. Semicond. > 1996, Volume 17 > Issue 9 > 689-692
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短沟道CMOS／SOI器件加固技术研究

张兴，奚雪梅，王阳元

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    Received: 18 August 2015 Revised: Online: Published: 01 September 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(9): 689-692
      张兴，奚雪梅，王阳元. 短沟道CMOS／SOI器件加固技术研究[J]. 半导体学报(英文版), 1996, 17(9): 689-692.
      Citation:
      张兴，奚雪梅，王阳元. 短沟道CMOS／SOI器件加固技术研究[J]. 半导体学报(英文版), 1996, 17(9): 689-692.
      shu

      • Received Date: 2015-08-18

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