Chin. J. Semicond. > 2003, Volume 24 > Issue 2 > 117-121
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采用局域注氧技术制备的新型DSOI场效应晶体管的热特性(英文)

林羲 , 何平 , 田立林 , 李志坚 , 董业民 , 陈猛 and 王曦

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Key words: DSOI, 局域注氧技术, 自热效应, 热阻

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    Received: 20 August 2015 Revised: Online: Published: 01 February 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(2): 117-121
      林羲, 何平, 田立林, 李志坚, 董业民, 陈猛, 王曦. 采用局域注氧技术制备的新型DSOI场效应晶体管的热特性(英文)[J]. 半导体学报(英文版), 2003, 24(2): 117-121.
      Citation:
      林羲, 何平, 田立林, 李志坚, 董业民, 陈猛, 王曦. 采用局域注氧技术制备的新型DSOI场效应晶体管的热特性(英文)[J]. 半导体学报(英文版), 2003, 24(2): 117-121.
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      • Received Date: 2015-08-20

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