Chin. J. Semicond. > 2001, Volume 22 > Issue 4 > 435-439
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CONTENTS

μc-Si∶H/a-Si∶H多层膜的周期性结构和量子尺寸效应

徐明 , 王洪涛 , 冯良桓 , 周心明 , 蔡亚平 , 冯技文 , 徐宁 and 麦振洪

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Key words: 射频辉光放电法, μc-Si∶H/a-Si∶H多层膜, 光学性质, 电导激活能

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    Received: 20 August 2015 Revised: Online: Published: 01 April 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(4): 435-439
      徐明, 王洪涛, 冯良桓, 周心明, 蔡亚平, 冯技文, 徐宁, 麦振洪. μc-Si∶H/a-Si∶H多层膜的周期性结构和量子尺寸效应[J]. 半导体学报(英文版), 2001, 22(4): 435-439.
      Citation:
      徐明, 王洪涛, 冯良桓, 周心明, 蔡亚平, 冯技文, 徐宁, 麦振洪. μc-Si∶H/a-Si∶H多层膜的周期性结构和量子尺寸效应[J]. 半导体学报(英文版), 2001, 22(4): 435-439.
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      • Received Date: 2015-08-20

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