| Citation: |
Bi Zhen, Zhang Jingwen, Bian Xuming, Wang Dong, Zhang Xin'+C143an, Hou Xun. MSM Ultraviolet Photodetector of Mg0.2Zn0.8O by LMBE[J]. Journal of Semiconductors, 2007, 28(8): 1242-1247.
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Bi Z, Zhang J W, Bian X M, Wang D, Zhang X, Hou X. MSM Ultraviolet Photodetector of Mg0.2Zn0.8O by LMBE[J]. Chin. J. Semicond., 2007, 28(8): 1242.
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MSM Ultraviolet Photodetector of Mg0.2Zn0.8O by LMBE
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Abstract
Mg0.2Zn0.8O films were deposited on the c-plane of sapphire by LMBE with two different structures.The films were all annealed in air at 900℃ for 1h.Then interdigital Al electrodes were evaporated on the films using the standard lift-off technique.A Mg0.2Zn0.8O ultraviolet photodetector was obtained,with a fast rise time of 14.3ns and fall time of 6.5μs.-
Keywords:
- Mg0.2Zn0.8O film,
- ultraviolet photodetector,
- response time
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References
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Proportional views
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