Fabrication of Hybrid Sol-Gel SiO2 Optical Waveguide Devices by UV-Light Imprinting

Wang Yue; Wu Yuanda; Li Jianguang; An Junming; Wang Hongjie; Yin Xiaojie; Zhang Jiashun; Hu Xiongwei

Chin. J. Semicond. > 2007, Volume 28 > Issue 7 > 1130-1133

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Fabrication of Hybrid Sol-Gel SiO2 Optical Waveguide Devices by UV-Light Imprinting

Wang Yue, Wu Yuanda, Li Jianguang, An Junming, Wang Hongjie, Yin Xiaojie, Zhang Jiashun and Hu Xiongwei

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Abstract: Photosensitive sol-gel SiO2 materials were synthesized by the organic-inorganic hybrid method,and were spun on silicon substrate.The effects of UV-light exposure time and the postbake temperature and time on the refractive index and depth of the films were investigated.1×2 and 1×4 MMI splitters were fabricated by means of UV-light imprinting technology,and good mode profiles were measured.

Key words: sol-gel, UV-light imprinting, hybridization, optical waveguide

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2.	Zhang, X., Xu, M., Ng, Z.K. et al. Diamond: Recent Progress in Synthesis and Its Potential in Electronics. Chemistry of Materials, 2025. doi:10.1021/acs.chemmater.5c00248

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Pengfei Qu, Peng Jin, Guangdi Zhou, Zhen Wang, Zhanguo Wang. Growth of two-inch free-standing heteroepitaxial diamond on Ir/YSZ/Si (001) substrates via laser-patterned templates[J]. Journal of Semiconductors, 2024, 45(9): 090501. doi: 10.1088/1674-4926/24060003

P F Qu, P Jin, G D Zhou, Z Wang, and Z G Wang, Growth of two-inch free-standing heteroepitaxial diamond on Ir/YSZ/Si (001) substrates via laser-patterned templates[J]. J. Semicond., 2024, 45(9), 090501 doi: 10.1088/1674-4926/24060003

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Received: 18 August 2015 Revised: 05 March 2007 Online: Published: 01 July 2007

Photosensitive sol-gel SiO2 materials were synthesized by the organic-inorganic hybrid method,and were spun on silicon substrate.The effects of UV-light exposure time and the postbake temperature and time on the refractive index and depth of the films were investigated.1×2 and 1×4 MMI splitters were fabricated by means of UV-light imprinting technology,and good mode profiles were measured.

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