Citation: |
孙瑛, 王凤英. p型扩散区(SiO_2/Si系扩Ga)的俄歇分析[J]. 半导体学报(英文版), 2002, 23(10): 1088-1092.
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References
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Proportional views
Key words: SiO2层, 镓扩散, 重金属杂质, 俄歇分析
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Received: 19 August 2015 Revised: Online: Published: 01 October 2002
Citation: |
孙瑛, 王凤英. p型扩散区(SiO_2/Si系扩Ga)的俄歇分析[J]. 半导体学报(英文版), 2002, 23(10): 1088-1092.
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