Chin. J. Semicond. > 1996, Volume 17 > Issue 9 > 713-716
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a－SiN∶H的退火处理及其对a－Si∶H TFT性能与可靠性的影响

李秀京，陈治明，田敬民

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    Received: 18 August 2015 Revised: Online: Published: 01 September 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(9): 713-716
      李秀京，陈治明，田敬民. a－SiN∶H的退火处理及其对a－Si∶H TFT性能与可靠性的影响[J]. 半导体学报(英文版), 1996, 17(9): 713-716.
      Citation:
      李秀京，陈治明，田敬民. a－SiN∶H的退火处理及其对a－Si∶H TFT性能与可靠性的影响[J]. 半导体学报(英文版), 1996, 17(9): 713-716.
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      • Received Date: 2015-08-18

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