
PAPERS
Zhang Xiaodan, Zhao Ying, Gao Yantao, Zhu Feng, Wei Changchun, 孙建, Sun Jian and Geng Xinhua
Abstract: The structure of microcrystalline silicon thin film solar cells prepared by very high frequency plasma enhanced chemical vapor deposition,is studied.Raman measurements indicate that there is an amorphous incubation layer at the p/i interface in the solar cells.The thickness of the incubation layer increases with increasing silane concentration and decreasing discharge power.A suitable silane concentration and discharge power can be used to reduce the thickness of the incubation layer.
Key words: microcrystalline silicon thin film solar cells, incubation layer, Raman scattering spectra
Article views: 3534 Times PDF downloads: 1545 Times Cited by: 0 Times
Received: 20 August 2015 Revised: Online: Published: 01 June 2006
Citation: |
Zhang Xiaodan, Zhao Ying, Gao Yantao, Zhu Feng, Wei Changchun, 孙建, Sun Jian, Geng Xinhua. Study of Incubation Layers in Microcrystalline Silicon Solar Cells[J]. Journal of Semiconductors, 2006, 27(6): 1030-1033.
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Zhang X D, Zhao Y, Gao Y T, Zhu F, Wei C C, Sun J, Geng X H. Study of Incubation Layers in Microcrystalline Silicon Solar Cells[J]. Chin. J. Semicond., 2006, 27(6): 1030.
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