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Study of Incubation Layers in Microcrystalline Silicon Solar Cells

Zhang Xiaodan, Zhao Ying, Gao Yantao, Zhu Feng, Wei Changchun, 孙建, Sun Jian and Geng Xinhua

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Abstract: The structure of microcrystalline silicon thin film solar cells prepared by very high frequency plasma enhanced chemical vapor deposition,is studied.Raman measurements indicate that there is an amorphous incubation layer at the p/i interface in the solar cells.The thickness of the incubation layer increases with increasing silane concentration and decreasing discharge power.A suitable silane concentration and discharge power can be used to reduce the thickness of the incubation layer.

Key words: microcrystalline silicon thin film solar cellsincubation layerRaman scattering spectra

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    袁红辉, 袁剑辉, 王京辉. 一种红外探测器专用77K工作CMOS前置放大器[J]. 半导体学报(英文版), 2005, 26(4): 790-794.
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    Received: 20 August 2015 Revised: Online: Published: 01 June 2006

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      袁红辉, 袁剑辉, 王京辉. 一种红外探测器专用77K工作CMOS前置放大器[J]. 半导体学报(英文版), 2005, 26(4): 790-794.
      Citation:
      Zhang Xiaodan, Zhao Ying, Gao Yantao, Zhu Feng, Wei Changchun, 孙建, Sun Jian, Geng Xinhua. Study of Incubation Layers in Microcrystalline Silicon Solar Cells[J]. Journal of Semiconductors, 2006, 27(6): 1030-1033. ****
      Zhang X D, Zhao Y, Gao Y T, Zhu F, Wei C C, Sun J, Geng X H. Study of Incubation Layers in Microcrystalline Silicon Solar Cells[J]. Chin. J. Semicond., 2006, 27(6): 1030.

      Study of Incubation Layers in Microcrystalline Silicon Solar Cells

      • Received Date: 2015-08-20

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