Chin. J. Semicond. > 2005, Volume 26 > Issue 6 > 1229-1233
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表面粘连效应对接触式微开关接触电阻的影响

黄见秋 and 黄庆安

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Key words: 微开关, MEMS, 接触电阻, 粘连效应

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    邢益荣. 利用CBE技术在Si衬底上生长GaAs薄膜[J]. 半导体学报(英文版), 1994, 15(4): 229-234.
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    Received: 19 August 2015 Revised: Online: Published: 01 June 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(6): 1229-1233
      邢益荣. 利用CBE技术在Si衬底上生长GaAs薄膜[J]. 半导体学报(英文版), 1994, 15(4): 229-234.
      Citation:
      黄见秋, 黄庆安. 表面粘连效应对接触式微开关接触电阻的影响[J]. 半导体学报(英文版), 2005, 26(6): 1229-1233.
      shu

      • Received Date: 2015-08-19

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