Chin. J. Semicond.
2005, 26(6): 1178-1181
Zhang Hongzhi, Hu Lizhong, Sun Xiaojuan, Wang Zhijun, Liang Xiuping. GaAs Microtips Grown by Selective LPE for SNOM Sensors[J]. Chin. Journal of Semiconductors, 2005, 26(6): 1178.
Zhang H Z, Hu L Z, Sun X J, Wang Z J, Liang X P. GaAs Microtips Grown by Selective LPE for SNOM Sensors[J]. Chin. J. Semicond., 2005, 26(6): 1178..Export: BibTex EndNote
Selective liquid phase epitaxy(LPE) is used to fabricate GaAs microtips for scanning near-field optical microscopy(SNOM) sensors.The (001) GaAs substrates are used instead of the wafers of a vertical-cavity surface-emitting laser during the preliminary experiments.Scanning electron microscopy(SEM) images show that in appropriate conditions the microtips are pyramid-like and distribute uniformly on the wafers.This method not only settles the problem of aligning the microtips with light-emitting windows of VCSEL,but also has practical values in batch production and parallel scanning with several microtips.
Selective liquid phase epitaxy(LPE) is used to fabricate GaAs microtips for scanning near-field optical microscopy(SNOM) sensors.The (001) GaAs substrates are used instead of the wafers of a vertical-cavity surface-emitting laser during the preliminary experiments.Scanning electron microscopy(SEM) images show that in appropriate conditions the microtips are pyramid-like and distribute uniformly on the wafers.This method not only settles the problem of aligning the microtips with light-emitting windows of VCSEL,but also has practical values in batch production and parallel scanning with several microtips.
Zhang H Z, Hu L Z, Sun X J, Wang Z J, Liang X P. GaAs Microtips Grown by Selective LPE for SNOM Sensors[J]. Chin. J. Semicond., 2005, 26(6): 1178...