A Solenoid-Type Inductor Fabricated by MEMS Technique

Gao Xiaoyu , Zhou Yong , Wang Xining , Lei Chong and Chen Ji’an，and Zhao Xiaolin

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Key words: inductance value, microelectromechanical systems, quality factor

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Received: 19 August 2015 Revised: Online: Published: 01 June 2005

Article Navigation > Journal of Semiconductors > 2005 > 26(6): 1083-1086

Gao Xiaoyu, Zhou Yong, Wang Xining, Lei Chong, Chen Ji’an，and Zhao Xiaolin. A Solenoid-Type Inductor Fabricated by MEMS Technique[J]. 半导体学报(英文版), 2005, 26(6): 1083-1086.

Citation:

Gao Xiaoyu, Zhou Yong, Wang Xining, Lei Chong, Chen Ji’an，and Zhao Xiaolin. A Solenoid-Type Inductor Fabricated by MEMS Technique[J]. 半导体学报(英文版), 2005, 26(6): 1083-1086.

Gao Xiaoyu, Zhou Yong, Wang Xining, Lei Chong, Chen Ji’an，and Zhao Xiaolin. A Solenoid-Type Inductor Fabricated by MEMS Technique[J]. 半导体学报(英文版), 2005, 26(6): 1083-1086.

Citation:

Gao Xiaoyu, Zhou Yong, Wang Xining, Lei Chong, Chen Ji’an，and Zhao Xiaolin. A Solenoid-Type Inductor Fabricated by MEMS Technique[J]. 半导体学报(英文版), 2005, 26(6): 1083-1086.

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