Chin. J. Semicond. > 2005, Volume 26 > Issue 6 > 1121-1125

A VHF PECVD Micro-Crystalline Silicon Bottom Gate TFT with a Thin Incubation Layer

Li Juan , Zhao Shuyun , Liu Jianping , Wu Chunya , Zhang Xiaodan , Meng Zhiguo and Zhao Ying，Xiong Shaozhen，Zhang Lizhu，and Jang Jin

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Key words: microcrystalline silicon, incubation layer, silicon concentration, bottom gate μc-Si TFT

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Received: 19 August 2015 Revised: Online: Published: 01 June 2005

Article Navigation > Journal of Semiconductors > 2005 > 26(6): 1121-1125

Li Juan, Zhao Shuyun, Liu Jianping, Wu Chunya, Zhang Xiaodan, Meng Zhiguo, Zhao Ying，Xiong Shaozhen，Zhang Lizhu，and Jang Jin. A VHF PECVD Micro-Crystalline Silicon Bottom Gate TFT with a Thin Incubation Layer[J]. 半导体学报(英文版), 2005, 26(6): 1121-1125.

Citation:

Li Juan, Zhao Shuyun, Liu Jianping, Wu Chunya, Zhang Xiaodan, Meng Zhiguo, Zhao Ying，Xiong Shaozhen，Zhang Lizhu，and Jang Jin. A VHF PECVD Micro-Crystalline Silicon Bottom Gate TFT with a Thin Incubation Layer[J]. 半导体学报(英文版), 2005, 26(6): 1121-1125.

Li Juan, Zhao Shuyun, Liu Jianping, Wu Chunya, Zhang Xiaodan, Meng Zhiguo, Zhao Ying，Xiong Shaozhen，Zhang Lizhu，and Jang Jin. A VHF PECVD Micro-Crystalline Silicon Bottom Gate TFT with a Thin Incubation Layer[J]. 半导体学报(英文版), 2005, 26(6): 1121-1125.

Citation:

Li Juan, Zhao Shuyun, Liu Jianping, Wu Chunya, Zhang Xiaodan, Meng Zhiguo, Zhao Ying，Xiong Shaozhen，Zhang Lizhu，and Jang Jin. A VHF PECVD Micro-Crystalline Silicon Bottom Gate TFT with a Thin Incubation Layer[J]. 半导体学报(英文版), 2005, 26(6): 1121-1125.

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